Analysis of the Degradation of a Machine in Semiconductor Manufacturing for Maintenance Decision Support

Aug 1, 2021·

Alexandre Moritz

Stéphane Dauzère-Pérès

Oussama Ben-Ammar

Philippe Vialletelle

· 0 min read

Source Document

Abstract

In this preliminary work, using industrial data, we investigate the impact of the degradation of an ion implantation machine in semiconductor manufacturing. Additionally, the impact of maintenance operations on the machine performance is discussed, as well as a decision support system.

Type

Conference paper

Publication

In Proceedings of the 2021 IEEE 17th International Conference on Automation Science and Engineering (CASE), IEEE

Last updated on Aug 1, 2021

Manufacturing, Maintenance and Supply Chains Semiconductor Manufacturing Big-Data and Data Mining Ion Implantation Decision Support

Authors

Alexandre Moritz

Staff Data Scientist | PhD in Industrial Engineering

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